发明名称 |
GAS TREATMENT APPARATUS |
摘要 |
A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume. |
申请公布号 |
EP3065849(A1) |
申请公布日期 |
2016.09.14 |
申请号 |
EP20140784346 |
申请日期 |
2014.09.30 |
申请人 |
EDWARDS LIMITED |
发明人 |
SEELEY, ANDREW JAMES;POPE, ALEXANDER MICHAEL;COHN, THOMAS FRANK |
分类号 |
B01D53/14;B01D46/00;B01D53/40;B01D53/68;B01D53/78 |
主分类号 |
B01D53/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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