| 摘要 |
PROBLEM TO BE SOLVED: To early resolve disturbance of chamber pressures in two chambers occurring in opening/closing a door interposed between the two chambers and stably maintain the two chambers to a predetermined pressure, in chamber pressure control of a biological clean room having adjacent two chambers.SOLUTION: In a chamber pressure control system, a first chamber 1 and a second chamber 2 are consecutively provided through a door 3. Then, the chamber pressure control system includes a first chamber pressure controller 12 for controlling chamber pressure in the first chamber and a second chamber pressure controller 13 for controlling chamber pressure in the second chamber. The chamber pressure control system has door opening detection means 8, 9, 10 of detecting two openings: door opening of 0 degree; and predetermined opening different from 0 degree.SELECTED DRAWING: Figure 1 |
