发明名称 |
Temperature controlled window with a fluid supply system |
摘要 |
The present invention provides a temperature controlled energy transparent window or electrode used to advantage in a substrate processing system. The invention also provides methods associated with controlling lid temperature during processing and for controlling etching processes. In a preferred embodiment the invention provides a fluid supply system for the lid which allows the fluid to flow through a feedthrough and into and out of a channel formed in the window or electrode. The fluid supply system may also mount the window or electrode to a retaining ring which secures the window or electrode to the chamber. In another aspect the invention provides a bonded window or electrode having a first and second plate having a channel formed in the plates so that when the plates are bonded together they form a channel therein through which a temperature controlling fluid can be flowed. An external control system preferably regulates the temperature of the fluid.
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申请公布号 |
US6916399(B1) |
申请公布日期 |
2005.07.12 |
申请号 |
US19990325026 |
申请日期 |
1999.06.03 |
申请人 |
ROZENZON YAN;LAVI GIL;LEE EVANS Y.;CHOI DONG HO;HAMRAH MATT;LUSCHER PAUL E.;VAIDYA KAUSHIK;PU BRYAN;FOVELL RICHARD |
发明人 |
ROZENZON YAN;LAVI GIL;LEE EVANS Y.;CHOI DONG HO;HAMRAH MATT;LUSCHER PAUL E.;VAIDYA KAUSHIK;PU BRYAN;FOVELL RICHARD |
分类号 |
H01J37/32;H01L21/00;(IPC1-7):C23C16/00;C23F1/00 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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