发明名称 |
Multichannel plate assembly for gas source molecular beam epitaxy. |
摘要 |
<p>A microchannel plate array assembly (10), comprising an array of microchannels in a microchannel plate (24), is provided in place of a conventional effusion cell to attain high and uniform fluxes localized in the substrate area for the growth of films thereon by gas source molecular beam epitaxy. Using this approach, an effective pressure at the substrate can be sustained which is as much as 100 times greater than the background pressure in the growth chamber. <IMAGE></p> |
申请公布号 |
EP0472316(A2) |
申请公布日期 |
1992.02.26 |
申请号 |
EP19910307129 |
申请日期 |
1991.08.02 |
申请人 |
HUGHES AIRCRAFT COMPANY |
发明人 |
ZINCK, JENNIFER J.;BAUKUS, JAMES P. |
分类号 |
C30B23/08;C30B23/06;H01L21/203 |
主分类号 |
C30B23/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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