PIEZOELECTRIC ELEMENT FOR ANGULAR VELOCITY SENSOR

摘要

PURPOSE:To obtain the piezoelectric element making the characteristics of an angular velocity sensor hard to change even when atmospheric temp. changes and having high mechanical strength. CONSTITUTION:The piezoelectric element for an angular velocity sensor contains a piezoelectric substrate 12. A dense layer 14 is formed to the piezoelectric substrate 12 from one end in the thickness direction thereof to the central part thereof and the area from the other end of said substrate in the thickness direction to the central part thereof is formed from a dense layer 16 and a porous layer 18. The occupying area ratio of the porous layer 18 in the cross section of a piezoelectric substrate 14 is set to 5-30%.