| 摘要 |
PURPOSE:To provide a large displacement at a low operation voltage and to improve reliability, respond rate and generated force by setting electrodes and a piezoelectric/electrostrictive working part. CONSTITUTION:A first electrode film 4, a filmy piezoelectric/electrostrictive layer 6 and a second electrode film 8 are laminated by a common film forming means to one face of a thin flat ceramic substrate 2 having 0.03-0.9mum surface roughness Ra made of a material consisting essentially of ZrO2 composed of mixed crystal comprising a crystal phase which is partially stabilized by mixing at least one compound selected from ones having a composition of 2-7mol% Y2O3, 6-15mol% CeO2 and 5-12mol% MgO, CaO having 0.05-3mum average particle diameter and contains mainly tetragonal system or at least two or more of tegragonal system, cubic system and monoclinic system. |
