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发明名称
SEMICONDUCTOR SILICON SUBSTRATE
摘要
申请公布号
JPH0661201(A)
申请公布日期
1994.03.04
申请号
JP19920234280
申请日期
1992.08.10
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
OTA YUTAKA
分类号
H01L21/02;H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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