BATCH-TYPE LOW-PRESSURE CVD APPARATUS,申请号JP19940242641-传众专利搜索

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发明名称	BATCH-TYPE LOW-PRESSURE CVD APPARATUS
摘要
申请公布号	JPH08107076(A)	申请公布日期	1996.04.23
申请号	JP19940242641	申请日期	1994.10.06
申请人	SONY CORP	发明人	OBARA KEIJI
分类号	C23C16/44;C23C16/54;H01L21/205;H01L21/677;H01L21/68;(IPC1-7):H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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