发明名称 Selecting control algorithms based on business rules
摘要 A method and apparatus is provided for selecting control algorithms based on business rules. The method comprises processing a workpiece using a processing tool. The processing tool is capable of processing the workpiece under a control of at least a first and a second control algorithm. The method further comprises detecting an occurrence of an event that affects an operation of the processing tool, selecting at least one of the first and second control algorithm based on detecting the occurrence of the event and processing a workpiece using the processing tool in accordance with the selected control algorithm.
申请公布号 US6922595(B1) 申请公布日期 2005.07.26
申请号 US20020134107 申请日期 2002.04.29
申请人 ADVANCED MICRO DEVICES, INC. 发明人 PETERSON ANASTASIA O.;MILLER MICHAEL L.
分类号 G05B13/02;G05B23/02;(IPC1-7):G06F19/00;G06F11/30;G06F15/00;G06F17/00 主分类号 G05B13/02
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