Halbleitervorrichtung samt Herstellungsverfahren,申请号DE19936011184T-传众专利搜索

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发明名称	Halbleitervorrichtung samt Herstellungsverfahren
摘要
申请公布号	DE69311184(T2)	申请公布日期	1997.09.18
申请号	DE19936011184T	申请日期	1993.03.26
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA, JP	发明人	IMAI, SHINICHI, KADOMA-SHI, OSAKA 571, JP;TERAI, YUKA, OSAKA-SHI, OSAKA 547, JP;FUKUMOTO, MASANORI, OSAKA-SHI, OSAKA 537, JP;YANO, KOUSAKU, KATANO-SHI, OSAKA 576, JP;UMIMOTO, HIROYUKI, MORIGUCHI-SHI, OSAKA 570, JP;ODANAKA, SHINJI, HIRAKATA-SHI, OSAKA 573, JP;MIZUNO, YASUO, HIRAKATA-SHI, OSAKA 573, JP
分类号	C23C16/40;H01L21/3105;H01L21/316;(IPC1-7):H01L21/316;H01L21/225	主分类号	C23C16/40
代理机构		代理人
主权项
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