| 摘要 |
PROBLEM TO BE SOLVED: To facilitate maintenance of respective equipment while mutual contamination between the equipment is prevented, by dividing an inner space into a plurality of chambers and arranging doors which are freely opened and closed on a parts of walls of the respective chambers. SOLUTION: An inner space is divided into a plurality of chambers, and a plurality of chambers R1 -R7 are constituted in the same housing. Doors 60a-60g are installed on parts needing maintenance of the chambers R1 -R5 , and accessing is enabled by opening the doors. For example, when the maintenance of a hub polishing equipment 22 or a dressing equipment 23 accommodated in the third chambers R3 is performed, accessing is enabled by opening the door 60d. When the maintenance of a polishing equipment 10a accommodated in the fifth chamber R5 is performed, accessing is enabled by opening the doors 60f, 60g installed on a bulkhead 44 to the space R7 for maintenance. |
