发明名称 TFT fabrication on leached glass surface
摘要 A method for forming top gated TFTs directly on a glass surface, wherein the glass surface is first leached adequately to provide a silica-rich boundary area at the glass surface, after which the source-drain semiconductor region is deposited directly onto the glass surface without a barrier layer.
申请公布号 US5985700(A) 申请公布日期 1999.11.16
申请号 US19960756844 申请日期 1996.11.26
申请人 CORNING INCORPORATED 发明人 MOORE, CHAD B.
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L21/36 主分类号 G02F1/136
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