| 摘要 |
PROBLEM TO BE SOLVED: To form a solid electrolyte film having uniform solid solution amount of oxides and also uniform electric conductivity. SOLUTION: A film is formed so that a solid electrolyte 28 is formed on a base 23 by the electrochemical evaporation method, in which the mixing rate of the first crude material component and the second crude material component at the EVD film forming stage is varied from the corresponding value at the CVD film forming stage, whereby the solid solution amount of oxides to the solid electrolyte film is made uniform, and it is possible to make uniform the electric conductivity of the solid electrolyte. |
