| 发明名称 |
Catadioptric projection objective |
| 摘要 |
There is provided a catadioptric projection objective that includes (a) an object plane having a rectangular object field, and (b) a beam splitter situated in a light path after the object plane, having a rectangular surface adapted to the object field and having an aspect ratio not equal to 1.
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| 申请公布号 |
US2002167734(A1) |
申请公布日期 |
2002.11.14 |
| 申请号 |
US20020114919 |
申请日期 |
2002.04.03 |
| 申请人 |
CARL ZEISS SEMICONDUCTOR MANFACTURING TECHNOLOGIES AG |
发明人 |
SCHUSTER KARL-HEINZ |
| 分类号 |
G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B27/14;G02B27/12 |
主分类号 |
G02B17/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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