| 摘要 |
PROBLEM TO BE SOLVED: To expand the tolerance to a mounting stress by dispersing and relieving the stress in mounting. SOLUTION: A protection plate 7 covering a diaphragm is fixed to a substrate 3 constituting a housing of the pressure sensor 1 as a reinforcing member, and the protection plate 7 is fixed to the substrate 3 with a plurality of welded parts 7D which are welded in a circular arc shape along its peripheral edge part. The mounting stress applied to a fixing hole 3C when the pressure sensor 1 is fixed to a device to be measured is distributed and relieved without being concentrated on one point because the welded parts 7D are divided. Therefore, the distortion of the diaphragm can be suppressed even when the fixing force is stronger than usual. COPYRIGHT: (C)2005,JPO&NCIPI
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