| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface cleaning device for contact materials where the whole surface of each contact material can be cleaned, and further, many contact materials can be continuously and efficiently cleaned. <P>SOLUTION: One sides of a plurality of reaction vessels 1 formed of an insulating material are opened as blow-out ports 2. A rare gas and a reactive gas are introduced into the respective reaction vessels 1 as the gases for plasma generation, and further, glow discharge is generated inside the respective reaction vessels 1 under the pressure in the vicinity of the atmospheric pressure. Plasma 5 generated by the glow discharge is blown out from the blow-out ports 2 of the respective reaction vessels 1 as plasma jets, and is fed to the surfaces of contact materials 6, thus contaminants on the surfaces of the contact materials 6 are removed. <P>COPYRIGHT: (C)2009,JPO&INPIT |
