| 摘要 |
PROBLEM TO BE SOLVED: To suppress remaining of a decontamination liquid in a decontamination liquid supply path after completion of a decontamination step.SOLUTION: A decontamination liquid spray device comprises: a sprayer having a first port, a second port, and a nozzle opening; first piping connected to an air compressor at one end and connected to the first port at the other end; a pump for drawing up a decontamination liquid from a container storing the decontamination liquid; second piping connected to the second port at one end and connected to the pump at the other end, and receiving the flow of the decontamination liquid drawn up by the normal rotation operation of the pump; and a control device for controlling the operation of the pump. The sprayer sucks the decontamination liquid flowing through the second piping by a negative pressure generated in the second port when air taken from the first port is jetted from the nozzle opening, and mixes the decontamination liquid with the air to jet the mixture from the nozzle opening in the form of fog. When the spraying of the decontamination liquid by the sprayer is completed, the control device makes the pump perform reverse rotation operation so as to recover the decontamination liquid remaining in the second piping.SELECTED DRAWING: Figure 3C |
