| 摘要 |
FIELD: plasma equipment, namely magnetron type spraying system, possibly used for depositing coatings onto surface of extended sheet materials, for example applying coatings on architectural designation glasses. ^ SUBSTANCE: magnetron type spraying apparatus includes magnetic unit having magnetic circuit 2 and permanent magnets 3; flat target-cathode 1. Magnetic unit is in the form of extended frame forming closed magnetic system with pole tips 8 turned inside frame. Flat target-cathode 1 is arranged along inner surface of said framework. Thin film deposition is realized simultaneously onto two flat substrates (glasses) moving through window (cavity) of frame. ^ EFFECT: improved design, possibility for applying low emission coatings onto flat glasses of large surface areas. ^ 9 cl, 4 dwg |
