| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an ion filter 10 used in an electronic amplifier 100.SOLUTION: There is provided a manufacturing method of an ion filter including the steps of: preparing a base material including an insulating base material, a conductive layer 12A formed of a first material on one main surface of the insulating base material 11, and a conductive layer 13A formed of a second material different from the first material on the other main surface of the insulating base material 11; removing a predetermined area of the conductive layer 12A formed on the one main surface to form a first conductive layer 12 of a predetermined pattern; applying laser beams from a side of the one main surface or using an etchant to remove an area corresponding to the predetermined area of the insulating base material 11; and allowing an etchant to act from both surface sides of a base material 10A the predetermined area of which has been removed and thereby removing an area corresponding to the predetermined area of a conductive layer 13A formed on the other main surface.SELECTED DRAWING: Figure 3 |
