| 摘要 |
This excimer laser chamber device may be provided with: a laser chamber; a first electrode disposed in the laser chamber; a second electrode disposed facing the first electrode, said second electrode being in the laser chamber; an electrode holder, which is disposed in the laser chamber, and is connected to a high voltage; at least one connecting terminal, which includes a first fixed portion with respect to the first electrode, and a second fixed portion with respect to the electrode holder, and which electrically connects the first electrode and the electrode holder to each other; a guide member, which is held by the electrode holder, and which aligns the first electrode in the direction substantially perpendicular to both the electric discharge direction between the first electrode and the second electrode, and the longitudinal direction of the first electrode; and an electrode gap variable device that moves the first electrode substantially parallel to the electric discharge direction. |
