| 发明名称 | Physical quantity sensor and electronic apparatus | ||
| 摘要 | A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis. | ||
| 申请公布号 | US9470711(B2) | 申请公布日期 | 2016.10.18 |
| 申请号 | US201313853437 | 申请日期 | 2013.03.29 |
| 申请人 | Seiko Epson Corporation | 发明人 | Tanaka Satoru |
| 分类号 | G01P15/125;G01P15/08 | 主分类号 | G01P15/125 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. A physical quantity sensor comprising: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis, wherein the coupling portion includes at least a first beam portion that extends along the first axis, a second beam portion that extends along the second axis, and a third beam portion that extends along the first axis, the support portion connecting to the third beam portion, and the fixed portion connecting to the first beam portion. | ||
| 地址 | JP | ||