Optical imaging arrangement with individually actively supported components

摘要

An optical imaging arrangement includes an optical projection unit and a control device. The optical projection unit includes a support structure and a group of optical element units adapted to transfer, in an exposure process using exposure light along an exposure light path, an image of a pattern of a mask unit onto a substrate of a substrate unit. The group of optical element units includes a first optical element unit and a plurality of second optical element units, the first optical element unit and the second optical element units, under a control by the control device, being actively supported by the support structure.

主权项

1. An arrangement, comprising:
an optical projection unit comprising:
a support structure; anda group of optical element units configured to transfer an image of a pattern of a first object onto a second object; and a control device, wherein:
the group of optical element units comprises a first optical element unit and a plurality of second optical element units;the first and second optical element units are actively supported by the support structure under control by the control device;the first optical element unit is actively supported at a first control bandwidth;the second optical element units are actively supported at a second control bandwidth to substantially maintain a given spatial relationship of each of the second optical elements with respect to the first optical element unit;the first control bandwidth is lower than the second control bandwidth; andthe arrangement is an optical imaging arrangement.