| 发明名称 |
FORMATION OF CAPPED NANO-PILLARS |
| 摘要 |
A method of forming capped nano-pillars on a substrate includes forming a template on the substrate, the template defining nano-pores having a first width. The nano-pores are partially filled to define nano-pillar stem portions of a first thickness corresponding to the first width. The nano-pores are re-shaped to define re-shaped nano-pore sections having a second width different than the first width. The re-shaped nano-pore sections are at least partially filled to define nano-pillar cap portions of a second thickness corresponding to the second width. The method further includes removing the template. |
| 申请公布号 |
US2016319445(A1) |
申请公布日期 |
2016.11.03 |
| 申请号 |
US201615203825 |
申请日期 |
2016.07.07 |
| 申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
Mardilovich Peter;Wei Qingqiao;Fuller Anthony M. |
| 分类号 |
C25D1/00;C25D11/02;B01D69/02;B01D63/08;B01D67/00 |
主分类号 |
C25D1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of forming capped nano-pillars on a substrate, the method comprising:
forming a template on the substrate, the template defining nano-pores having a first width; partially filling the nano-pores to define nano-pillar stem portions of a first thickness corresponding to the first width; re-shaping the nano-pores to define re-shaped nano-pore sections having a second width different than the first width; at least partially filling the re-shaped nano-pore sections to define nano-pillar cap portions of a second thickness corresponding to the second width; and removing the template. |
| 地址 |
Houston TX US |
