LOW STRESS HARD COATINGS AND APPLICATIONS THEREOF

摘要

In one aspect, coated cutting tools are described herein comprising a substrate and a coating comprising a refractory layer deposited by physical vapor deposition adhered to the substrate, the refractory layer comprising M1-xAlxN wherein x≧0.68 and M is titanium, chromium or zirconium, the refractory layer including a cubic crystalline phase and having hardness of at least 25 GPa.

主权项

1. A method of making a coated cutting tool comprising:
providing a cutting tool substrate; and depositing a coating over a surface of the substrate, the coating comprising a refractory layer including M1-xAlxN wherein x≧0.64 and M is titanium, chromium or zirconium, the refractory layer including a cubic crystalline phase, wherein the coating is deposited with a cathodic arc deposition apparatus comprising at least one anode having an annular extension.