| 主权项 |
1. A semiconductor device comprising a diode region and an IGBT region in a same semiconductor substrate,
wherein the diode region comprises: a cathode electrode; a cathode region configured of a first conductive type semiconductor; a first drift region configured of a first conductive type semiconductor having a low impurity concentration; a lower anode region configured of a second conductive type semiconductor; an upper anode region configured of a second conductive type semiconductor; an anode electrode configured of metal; a first barrier region configured of a first conductive type semiconductor having a higher impurity concentration than the impurity concentration of the first drift region, and arranged between the lower anode region and the upper anode region; and a first pillar region configured of a first conductive type semiconductor having a higher impurity concentration than the impurity concentration of the first barrier region, and arranged so as to connect the first barrier region and the anode electrode, the first pillar region and the anode electrode make a Schottky junction, the IGBT region comprises: a collector electrode; a collector region configured of a second conductive type semiconductor; a second drift region configured of a first conductive type semiconductor having a low impurity concentration, and being in continuation with the first drift region; a lower body region configured of a second conductive type semiconductor; an upper body region configured of a second conductive type semiconductor; an emitter region configured of a first conductive type semiconductor; an emitter electrode configured of metal; a gate electrode opposed to the lower body region and the upper body region that are between the emitter region and the second drift region, with an insulation film interposed therebetween; a second barrier region configured of a first conductive type semiconductor having a higher impurity concentration than the impurity concentration of the second drift region, and arranged between the lower body region and the upper body region; and a second pillar region configured of a first conductive type semiconductor having a higher impurity concentration than the impurity concentration of the second barrier region, the second pillar region and the emitter electrode make a Schottky junction, and a resistance value of the second pillar region between the emitter electrode and the second barrier region is lower than a resistance value of the first pillar region between the anode electrode and the first barrier region when the semiconductor device operates as a diode. |
