Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement

摘要

The disclosure relates to a micro-electromechanical membrane arrangement with a substrate, which has a multiplicity of recesses on a surface, a first electrically conductive electrode layer, which is arranged on the surface of the substrate and has a multiplicity of first depressions coinciding with the recesses, and an electrically conductive membrane layer, which can be deflected in a direction perpendicular to the active surface of the substrate, is arranged over the first electrode layer and is kept at a distance therefrom by a first distance value.

主权项

1. A microelectromechanical membrane arrangement, comprising:
a substrate having an upper surface in which a plurality of cutouts are defined; a first electrically conductive electrode layer arranged on the surface of the substrate and along walls of the cutouts, thereby defining a plurality of first depressions corresponding to the plurality of cutouts; and an electrically conductive membrane layer configured to be deflected in a direction perpendicular to the surface of the substrate, arranged over the first electrode layer, and spaced apart from the first electrode layer by a first distance.