Micro electro mechanical systems device and apparatus for compensating tremble

摘要

Disclosed are a micro electro mechanical systems (MEMS) device and an apparatus for compensating for a tremble. The MEMS device includes a substrate; a driven member moving relative to the substrate; an elastic member connected to the driven member and the substrate; a driving member fixed to the substrate for driving the driven member; and a dynamic stopper fixed to the substrate and latched to the driven member.

主权项

1. A MEMS device comprising:
a substrate; a driven member moving relative to the substrate; an elastic member connected to the driven member and the substrate; a driving member fixed to the substrate for driving the driven member; a dynamic stopper fixed to the substrate and latched to the driven member; an insulation layer coated on an entire surface of the dynamic stopper; wherein the driven member comprises a latch groove, wherein the dynamic stopper is inserted into the latch groove to fix the driven member, and wherein the insulation layer is interposed between the dynamic stopper and an inner wall of the latch groove and inserted into the latch groove when the driven member is not being driven by the driving member; and wherein the dynamic stopper is entirely spaced apart from the inner wall of the latch groove by the insulation layer.