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发明名称
ETCHING DEVICE FOR SUBSTRATE
摘要
申请公布号
JPH05287558(A)
申请公布日期
1993.11.02
申请号
JP19920118159
申请日期
1992.04.09
申请人
NIPPON TEC KK
发明人
IIDA MASUO
分类号
C23F1/08;H05K3/06;(IPC1-7):C23F1/08
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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