发明名称 HIGH THROUGHPUT SURFACE TREATMENT ON COILED FLEXIBLE SUBSTRATES
摘要 One or more substrates may be coiled into one or more coils in such a way that adjacent turns of the coils do not touch one another. The one or more coiled substrates are placed in a treatment chamber where substantially an entire surface of the one or more coiled substrates may be treated with a surface treatment process. One or more spacers may be placed between adjacent layers of the coiled substrate before a full turn of the substrate has been coiled around a carousel.
申请公布号 WO2005081788(A2) 申请公布日期 2005.09.09
申请号 WO2005US03691 申请日期 2005.02.07
申请人 NANOSOLAR, INC.;ROSCHEISEN, MARTIN, R.;PICHLER, KARL 发明人 ROSCHEISEN, MARTIN, R.;PICHLER, KARL
分类号 B05D3/12;C23C16/00;C23C16/40;C23C16/455;C23C16/458;C23C16/54 主分类号 B05D3/12
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