HIGH THROUGHPUT SURFACE TREATMENT ON COILED FLEXIBLE SUBSTRATES
摘要
One or more substrates may be coiled into one or more coils in such a way that adjacent turns of the coils do not touch one another. The one or more coiled substrates are placed in a treatment chamber where substantially an entire surface of the one or more coiled substrates may be treated with a surface treatment process. One or more spacers may be placed between adjacent layers of the coiled substrate before a full turn of the substrate has been coiled around a carousel.
申请公布号
WO2005081788(A2)
申请公布日期
2005.09.09
申请号
WO2005US03691
申请日期
2005.02.07
申请人
NANOSOLAR, INC.;ROSCHEISEN, MARTIN, R.;PICHLER, KARL