| 摘要 |
PURPOSE:To rationarize the fabrication while facilitating management of product by enhancing the reliability of electric joint in a capacitive acceleration sensor having a five layer laminate structure. CONSTITUTION:The capacitive acceleration sensor has a laminate structure of five layers, i.e., quasi-intermediate layers of glass plates 2, 3 comprising an intermediate silicon plate 1 having a movable electrode 1A and fixed electrodes 2A, 3A, and outer layer silicon electrode plates 4, 5. Lead electrode films 8, 9 from the fixed electrodes 2A, 3A are formed on the surface of holes 6, 7 made on the glass plates 2, 3. The terminals 8', 9' of the lead electrode films stretch to the outer surfaces of the glass plates 2, 3 and come into mechanical or eutectic contact with the outer layer silicon electrode plates 4, 5. The five layers may be subjected to simultaneous anodic bonding or the silicon plates 4, 5 may be placed partially on the glass plates 2, 3 so that the interior of the sensor can be viewed through the glass plates 2, 3. |
