| 摘要 |
<p>PURPOSE: To reduce the effects of the distortions of local arrangements present on a substrate to be processed when using a global alignment method. CONSTITUTION: According to the respective positions of a plurality of processing regions (S1 , S2 , S3 ) on a substrate (W) to be processed, the weightings of the alignment data of sample shots (A1 , A2 , A3 , A4 , A5 , A6 , A7 A8 ) selected from among the plurality of processing regions on the substrate W to be processed are performed, and based on the weighted alignment data, the respective relative positional relations of the plurality of processing regions to respective processing reference positions are determined.</p> |
