| 摘要 |
<p>PURPOSE: To provide an attachment structure of an air chuck unit which can be adapted to a plurality of kinds of objects to be measured. CONSTITUTION: By an attachment structure, an air chuck unit 10 is attached to a measurement table 12. The unit 10 has upper and lower glass plates 10a, 10b bonded to each other by a bonding agent 10c, and on the rear surface side of the glass plate 10a, an air flow path 10d is provided, and in the adequate places of the air flow path 10d, air holes 10f having their openings on the top surface of the glass plate 10a are provided. In the unit 10, a plurality of attachment holes 10h are provided, and the plural attachment holes 10h whose dimensions in length and width are different from each other are prepared. The measurement table 12 has a glass plate 12a, a plurality of attachment holes 12b provided in the glass plate 12a and screw holes 12d formed in a metallic plate 12c fastened to the rear surface of the glass plate 12a. The positions of the attachment holes 12d are opposed respectively to the ones of the attachment holes 10h on the side of the unit 10. In the case of the measurement of an object to be measured, one of the plural units 10 is selected correspondingly to the size of the object, and it is fastened to the table 12 by bolts with O rings.</p> |
