| 摘要 |
<p>PURPOSE: To improve a fast response of the inching positioning device by using a means not causing mechanical interference at a lower cost. CONSTITUTION: The device is provided with a board 1 to be positioned, an actuator 20 consisting of a piezoelectric element and a displacement extension mechanism to drive the board, a position sensor 3 detecting a displacement of the board in the vicinity of the actuator, a preamplifier 6, a programmable gain element 7, and a current output power amplifier 8, a feedback device comparing an output from the position sensor 3 with an external command voltage to obtain a deviation signal (e), exciting the current output power amplifier 8 based on the deviation signal (e) via the preamplifier 6 and the programmable gain element, and driving the actuator 20 with its output current, a force sensor 10 integrated in the actuator 20, a force detector 11 converting the output of the force sensor 10 into an electric signal, a force compensation device 12 compensating an output of the force sensor 11, and a force feedback means feeding back negatively an output of the force sensor 11 to an input of the current output power amplifier 8 via the compensation device 12.</p> |
