| 摘要 |
PROBLEM TO BE SOLVED: To obtain an equipment for analyzing a sample by irradiating the sample with an electron beam in which even a region smaller than 1μm can be measured while enhancing the discrimination and identification accuracy of an organic substance. SOLUTION: The analyzer comprises a section for irradiating a sample 11 containing an organic substance with an electron beam, a section 13 for detecting spectrum of fluorescence emitted from the sample 11, a memory section 15 for storing the shape of reference spectrum of fluorescence when a specific organic substance is irradiated with an electron beam, and a section 14 for discriminating and identifying the organic substance in the sample 11 by comparing the stored reference spectrum with the detected spectrum. Fluorescence of wide spectrum is emitted from the sample 11 even in the ultraviolet region by irradiating the sample with an electron beam having higher energy than the light and the organic substance is discriminated and identified by comparing a measurement spectral pattern obtained from the fluorescence with the prestored reference spectral pattern.
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