Vorrichtung zur Handhabung schwerer Bauteile einer in einem Traggestell abgestützten Kristallziehmaschine nach dem Czochralski-Verfahren

摘要

The apparatus handling heavy components of a machine is supported from a carrier structure (1) and draws crystals by the Czochralski process. A crucible on support bolts in the drawing chamber is heated by surrounding heating elements, and the crystal is drawn upwards into a closable airlock chamber by a drawing unit above the melt surface. The apparatus incorporates a horizontal carrier beam (16) which is vertically displaceable and pivotable about a vertical axis, preferably about one of the columns of the carrier structure. The beam (16) is provided with carrier claws (17, 17') for elements of machine components, or with auxiliary units such as, for example, grippers attached to flange rings. Additionally, the beam (16) carries profiled cross rails (19, 19') for a movable carriage provided with means for gripping and holding the crystal.