Method of manufacturing a field emission cathode

摘要

A field emission cathode manufacturing method is provided which comprises the steps of forming a cathode electrode (12) on a substrate (11); forming an insulative layer and gate electrode (14). each having fine holes formed therein, in this order on the cathode electrode (12); thereafter immersing them in a solution in which particles of an electron-emitting substance is dispersed: and electrically depositing particles of the electron emission substance on the cathode electrode (12) facing the fine holes by an electrophoresis using the cathode electrode (12) as a positive or negative electrode, thereby forming an electron emitter (16). The field emission cathode manufacturing method permits to produce a large-screen cathode plate of which the electron emission characteristic will not be deteriorated, with a greater ease and an improved yield. <IMAGE>