Conductive ball mounting apparatus

摘要

A suction head has a plurality of suction units. The respective suction units have spaces each connected with a vacuum pump through a first valve. A sensor observes works on a substrate to inspect whether or not a bad mark is marked on the works. The spaces are separated from one another so that only the spaces corresponding to works of good quality with no bad mark are vacuum-evacuated so as to vacuum-suck conductive balls, while preventing the space corresponding to defective work or works with the bad mark from being vacuum-evacuated by closing a first valve so as to cancel the mounting of the conductive balls.