| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device, capable of executing comparatively inexpensive mapping without requiring complicated works for mapping a measuring object or without complicating an optical system, and to provide a method for mapping comparatively simply. SOLUTION: This microscopic device 2, capable of executing mapping measurement of a sample to be measured 4, is equipped with a stage 6 for loading the sample to be measured 4, and an aperture 22 arranged on a conjugate plane b relative to an observation plane of the sample to be measured, capable of restricting an observation range of the sample to be measured by the size of the opening. The device 2 is characterized by executing a mapping measurement in a specific range of the sample to be measured, without moving the stage on the plane parallel to the observation plane by adjusting the opening position of the aperture, because the opening of the aperture can be set not about the optical axis of the microscopic device on the conjugate plane relative to the observation plane of the sample to be measured.</p> |
