Method of forming film for organic electrified light emitting elements

摘要

A method of forming a film for organic electrified light emitting elements includes aligning a substrate with a shadow mask outside a vacuum deposition chamber; moving the aligned substrate and the shadow mask into the vacuum deposition chamber through a robotic arm and holding the aligned substrate and the shadow mask through an alignment mechanism; and plating an organic material from a vaporization material by vaporization to form a film of the organic electrified light emitting elements on the substrate.