| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method which enables a reduction in thermal effects during machining and prevent a quality deterioration of a hole. <P>SOLUTION: A mode-locked laser beam is emitted from a mode lock laser oscillator 1. The laser beam emitted from the mode lock laser oscillator 1 is made incident on a workpiece 9. A hole is formed to the workpiece 9. A pulse laser beam, whose pulse width is in the order of the picosecond, can be obtained by using the mode lock laser oscillator. As a result, the thermal influence can be reduced. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
