| 摘要 |
A new method of surface engineering of materials employs ion sputtering from a limited area, or sputter zone, of the surface of said materials, and the deposition of the sputtered matter upon a separate or other limited area, or deposition zone, of the surface of the same or simultaneously surface engineered second material, while the sputter and deposition zones are moving synchronously and simultaneously relative to the surface subjected to surface engineering. When the surfaces of two materials are simultaneously engineered, the flux of particles ejected from the sputter zone of the first material are directed to and deposited upon the surface of the deposition zone of the second material, and vice versa; hence, two different materials each possessing both sputter and deposition zones are subjected to surface engineering at the same time resulting in an exchange of surface layers. The new method is named Trans-Zone Sputtering. Where it is applicable, especially in precise surface engineering and ultra-thin film deposition technologies, Trans-Zone Sputtering is characterized by exceptionally high productivity; it does not require expensive consumable targets, and in some instances it avoids the necessity of water cooling, thus simplifying the process and reducing the weight, while simultaneously allowing a thinner magnetron and increasing the effectiveness of the magnetron cathode assembly; it also simplifies the maintenance of the equipment, reduces labor requirements and virtually avoids harmful emissions often occuring with this technology during the equipment maintenance.
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