| 摘要 |
An image defect inspection apparatus 1 which performs a defect detection for detecting a defect on a surface of a sample 100 by comparing corresponding portions in an image captured of the surface of the sample 100 that are supposed to be identical to each other, and a reexamination for reexamining a site at which the defect was detected in the captured image, comprises: a plurality of processor elements PE 1 to PE 3 which perform the defect detection in parallel on regions created by dividing the captured image; and a processor unit PU 1, which receives defect information in parallel from the plurality of processor elements PE 1 to PE 3 as information concerning individual defects detected by the processor elements PE 1 to PE 3 , and which outputs the defect information as a set of defect information. Each individual one of the processor elements PE 1 to PE 3 performs the reexamination on the defect detected through the defect detection performed by the individual processor element, before sending the defect to the processor unit PU 1.
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