发明名称 OBJECTIVES AS A MICROLITHOGRAPHY PROJECTION OBJECTIVE WITH AT LEAST ONE LIQUID LENS
摘要 The invention relates to an objective designed as a microlithography projection objective for an operating wavelength. The objective has a greatest adjustable image-side numerical aperture NA, at least one first lens made from a solid transparent body, in particular glass or crystal, with a refractive index n<SUB>L </SUB>and at least one liquid lens (F) made from a transparent liquid, with a refractive index n<SUB>F</SUB>. At the operating wavelength the first lens has the greatest refractive index n<SUB>L </SUB>of all solid lenses of the objective, the refractive index n<SUB>F </SUB>of the at least one liquid lens (F) is bigger than the refractive index n<SUB>L </SUB>of the first lens and the value of the numerical aperture NA is bigger than 1.
申请公布号 US2008030869(A1) 申请公布日期 2008.02.07
申请号 US20070758363 申请日期 2007.06.05
申请人 CARL ZEISS SMT AG 发明人 SHAFER DAVID R.;BEDER SUSANNE;SCHUSTER KARL-HEINZ;SINGER WOLFGANG
分类号 G02B3/12;G03F7/20 主分类号 G02B3/12
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