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发明名称
Apparatus for Processing HMDS and Method Therefor
摘要
申请公布号
KR100824631(B1)
申请公布日期
2008.04.24
申请号
KR20060081619
申请日期
2006.08.28
申请人
发明人
分类号
H01L21/027;H01L21/02
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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