发明名称 |
Method of Making Ceramic Reactor Components and Ceramic Reactor Component Made Therefrom |
摘要 |
A method of improving the adhesion of processing materials on a ceramic component is described. The method includes the steps of forming a green ceramic component and texturing the surface of the green ceramic component. The as-textured component is then fired to harden the ceramic material. In an alternative embodiment of the method, a coating is applied to the surface of the as-fired ceramic component to provide a secondary adhesion layer. A ceramic component for use in an etching or deposition reactor chamber is also described. The ceramic component includes a substrate formed of a ceramic material and has a textured surface formed thereon such that the textured surface has a roughness of about 100 to 1000 muin R<SUB>a</SUB>. |
申请公布号 |
US2008233403(A1) |
申请公布日期 |
2008.09.25 |
申请号 |
US20080026806 |
申请日期 |
2008.02.06 |
申请人 |
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发明人 |
DYER TIMOTHY;OUK HO;JENSEN LOUIS EVERETT |
分类号 |
B32B3/00;B28B11/08;B29C59/14;B32B18/00 |
主分类号 |
B32B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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