| 摘要 |
PROBLEM TO BE SOLVED: To provide a bearing device including a drive mechanism easy to be installed on an existing bearing device not provided with a drive mechanism by post-installation and capable of inhibiting increase of space volume of a bearing device whole body in a bearing device in which a movable part is supported against a fixed part by an air bearing. SOLUTION: A long fixed part 2 is provided with the movable part 3 guided along with a fixed part 2. The movable part 3 is supported by the air bearing capable of guiding the movable part 3 with floating from the fixed part 2. The movable part 3 is provided with a motor unit 4 driving the movable part 3, and the motor unit 4 comprises the motor and a wheel 8 rotated by drive force of the motor and contacting the fixed part 2. Consequently, increase of space volume of a bearing device 1 whole body can be inhibited by providing the motor unit 4. The motor unit 4 can be easily retrofitted to the existing bearing device since the motor unit 4 is attached on the movable part 3. COPYRIGHT: (C)2009,JPO&INPIT
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