| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive sensor capable of relaxing stress of a vibration part, of reducing parasitic capacitance generated between the vibration part and a back electrode plate, of sufficiently securing sensitivity to low-frequency sound, and of securing drop impact-resistant performance. SOLUTION: This capacitive sensor S includes: a base material having a part functioning as the vibration part 4a, and the other part functioning as a non-vibration part 4b surrounding the vibration part 4a; the back electrode plate 6 arranged in a form facing the vibration part 4a and at a predetermined distance from the base material; and spacers 5 arranged at a plurality of parts on the non-vibration part 4b side in the vicinities of boundaries 12 between the vibration part 4a and the non-vibration part 4b, and holding the predetermined distance between the back electrode plate 6 and the base material. A plurality of through-holes 9 or depressions 14 or thinned parts N formed by combining the through-holes 9 and the depressions 14 to be arranged in directions along the boundaries 12 are formed at positions of the vibration part 4a facing the spacers 5 by interposing the boundaries 12. COPYRIGHT: (C)2009,JPO&INPIT
|
