发明名称 TERAHERTZ DEVICE AND MANUFACTURING METHOD FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a terahertz device having a surface light-emitting radiation pattern or a surface light-receiving pattern.SOLUTION: A terahertz device 30 includes: a semiconductor substrate 1; a first semiconductor layer 91a arranged on the semiconductor substrate 1; an active element 90 laminated on the first semiconductor layer 91a; a second electrode 2 connected to the first semiconductor layer 91a and a cathode K of the active element 90 and arranged on the semiconductor substrate 1; a first electrode 4 connected to an anode A of the active element 90 and arranged on the semiconductor substrate 1 opposed to the second electrode 2; and a rear-surface reflector metal layer 88 arranged on a rear surface of the semiconductor substrate 1 opposed to the first semiconductor layer 91a. The active element 90 forms a resonator between the second electrode 2 and the first electrode 4. Electromagnetic waves are reflected by the rear-surface reflector metal layer 88 and have a surface light-emitting radiation pattern or a surface light-receiving pattern perpendicular to the semiconductor substrate 1.SELECTED DRAWING: Figure 2
申请公布号 JP2016111542(A) 申请公布日期 2016.06.20
申请号 JP20140247779 申请日期 2014.12.08
申请人 ROHM CO LTD 发明人 MUKAI TOSHIKAZU;TSURUDA KAZUISAO
分类号 H03B7/08;H01Q9/16 主分类号 H03B7/08
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