Optical measurement system with polarization compensation, and corresponding method

摘要

A method for the adjustment of an optical measurement system comprises providing an optical measurement system, which comprises, as optical elements, a beam splitter; a first photo sensor, exposed by a first partial beam from the beam splitter; an optical filter; a second photo sensor, arranged downstream of the optical filter, exposed by a second partial beam from the beam splitter. Additionally, the angularity and relative position between multiple optical elements is designed to be adjustable. The method further comprises providing a device for generating a difference signal from the two photo sensors; providing a light source with periodically varying polarization; irradiating the light in the beam splitter, so that the two respective photo sensors are exposed by a partial beam; generating a difference signal of the output signals of the photo sensors; varying the position and/or angularity of at least one optical element, and observing the difference signal, determine the combination of angularity/position of the elements where a minimum difference signal is achieved, and configuring the angularity of the optical elements to the determined values. Further, a corresponding system is proposed.

主权项

1. A method for adjustment of an optical measurement apparatus, comprising:
providing an optical measurement apparatus, which comprises, as optical elements: a beam splitter; a first photo sensor, exposed by a first partial beam from the beam splitter; an optical filter; a second photo sensor, arranged downstream of the optical filter, exposed by a second partial beam from the beam splitter, wherein the angularity and relative position between multiple optical elements is arranged to be adjustable and wherein the first and second photo sensors are configured to generate different output signals; providing a device for generating a difference signal from the signals of both photo sensors; providing a light source for generating light with periodically varying polarization; irradiating the light into the beam splitter, so that both photo sensors are exposed by each respective partial beam; generating a difference signal of the output signals of the photo sensors; varying the position and/or angularity of at least one optical element, and measuring the difference signal; and determining the combination of angularity/position of the elements which achieves a minimum difference signal.