APPARATUS AND METHOD FOR CALSSIFYING SUBSTRATE

摘要

According to an embodiment of the present invention, a substrate classifying device comprises: a calculation unit configured to calculate the number of substrates which represents a difference between the design location and the actual location by comparing a design location with an actual location of a reference point of a substrate; a grouping unit configured to set a plurality of error partition regions by partitioning an error region composed of the difference and to divide the substrate into substrate groups in accordance with each of the error partition regions; and a setting unit configured to set a location correction value with respect to each of the substrate groups. Therefore, the device accurately corrects a location.